采用超声波扫描(SAM)、俄歇电子能谱分析技术(AES)、电极粘附力测试和I-V特性测试等方法研究了化学沉积、溅射和真空蒸发三种不同沉积工艺条件下Au/p-CdZnTe接触界面的各种特性.通过实验结果可以看出,化学法沉积的Au电极能形成较好的欧姆接触特性,但其操作工艺不容易控制,电极接触层均匀性较差,在器件使用过程中,容易引起电极的退化;溅射沉积的Au电极有着较好的附着力,但对CdZnTe表面的损伤较大,欧姆接触特性较差;真空蒸发法沉积的Au电极,有着较好的欧姆接触特性,且其电极接触层也较为均匀,只是电极附着力相对较小,但可以通过合适的退火工艺进行改善.
参考文献
| [1] | Niraula M.;Nakamura A.;Aoki T.;Tomita Y.;Hatanaka Y. .Stability issues of high-energy resolution diode type CdTe nuclear radiation detectors in a long-term operation[J].Nuclear Instruments and Methods in Physics Research, Section A. Accelerators, Spectrometers, Detectors and Associated Equipment,2002(1/2):168-175. |
| [2] | Murray W;Krueger K;Rawool-Sullivan M W.Temperature Effects on CdZnTe Detector Performance[A].Washington,DC,1999:643-645. |
| [3] | Burger A.;Chen H. .Investigation of electrical contacts for Cd/sub 1-x/Zn/sub x/Te nuclear radiation detector[J].IEEE Transactions on Nuclear Science,1997(3):934-938. |
| [4] | J. Barton;T. Randles;S. Hearne;J. Barrett;P.V. Kelly;G.M. Crean;P. Siffert;J.M. Koebel .Scanning Acoustic Microscopy and SIMS investigation of CdTe detectors[J].Nuclear Instruments and Methods in Physics Research, Section A. Accelerators, Spectrometers, Detectors and Associated Equipment,2001(1/2):431-436. |
| [5] | Wenbin Sang;Jin Wei;Zhang Qi;Li Wanwan;Min Jiahua;Teng Jianyong;Qian Yongbiao .Primary study on the contact degradation mechanism of CdZnTe detectors[J].Nuclear Instruments and Methods in Physics Research, Section A. Accelerators, Spectrometers, Detectors and Associated Equipment,2004(3):487-492. |
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