本文对PECVD制备的红外热敏材料掺磷非晶硅薄膜的两个关键热电参数-红外吸收系数和电阻温度系数-采用红外透射谱、拉曼谱和电阻率测量进行了深入的研究.实验结果表明,对样品进行退火30 min后,薄膜结构可以达到稳定;随着退火温度的增加,样品的红外透射率下降;当退火温度达到700℃时,薄膜完全晶化;与此同时,电阻率和电阻温度系数随掺杂浓度和退火温度的增加而减小.根据Lu的模型,对这些现象进行了解释并给出了制备和退火的优化条件.
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