硫化锡(SnS)具有很高的光吸收系数和合适的禁带宽度,又无毒性,因此在太阳电池等光电器件中具有潜在应用价值.本文用真空蒸发法制备掺杂的SnS薄膜,掺杂源有Sb、Sb2O3、Se、Te、In、In2O3、Se和In2O3的混合物.对各种掺杂SnS薄膜的厚度、电流-电压(I-V)特性等进行了表征,并计算了其电阻率和光电导与暗电导的比值(Gphoto/Gdark).结果表明较有效的掺杂源是Sb,Sb掺杂的薄膜电阻率比纯薄膜的电阻率降低四个数量级,Gphoto/Gdark增加约一倍.同时,研究了Sb掺杂量对SnS薄膜电学性能的影响,表明Sb的最佳掺入量约为1.3wt%~1.5wt%.
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