本工作设计了一种基于AlAs/InGaAs/GaAs量子隧穿效应的纳机电拍子式声传感器,并采用ANSYS有限元分析软件对敏感元件的布置位置进行了最优化仿真设计.在加工工艺上,采用双空气桥技术和Au/Ge/Ni合金膜系欧姆接触技术有效降低了电容、电阻等对器件结构性能的影响;在传感器的具体加工过程中,共振隧穿结构(RTS)和拍子结构是通过控制孔技术一次流片完成的.对所加工的传感器进行了初步测试,结果表明,传感器频响能较好的与仿真结果相吻合,1.3KHz时同时具有较好的线性特性.
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