采用微机电系统加工技术制作出一种结构新颖的微型电磁式振动能量采集器,它可以把周围环境中的振动能转换为电能.整个结构主要由圆形SmCo28永磁体、铜平面弹簧和双层线圈构成.采用Uv-LIGA技术和电镀技术制作铜平面弹簧和双层线圈,并与永磁体一起组装成试验样机,其体积大约为200mm3.Ansys有限元仿真结果表明共振结构的一阶固有频率为129.3Hz.对组装好的电磁式振动能量采集器试验样机的初步测试表明:在加速度为3g(g=9.8m/s2)的外界输入冲击下,负载两端的交流电压峰峰值为32.5mV.
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