采用基于磁控等离子体团簇束流源的低能团簇束流沉积制备不同形态的Pb纳米颗粒薄膜.通过透射电子显微镜TEM对颗粒的尺寸、数密度进行表征分析,建立磁控等离子体团簇源及低能团簇束流沉积过程的可调参数--溅射气流、缓冲气流、溅射电压电流、沉积时间等与颗粒尺寸、数密度的对应关系,并通过对参数的调整优化获得Pb纳米颗粒薄膜中颗粒尺寸和数密度的独立调控.
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