近年来,用于生物,制药等领域的微量试剂自动化分配技术不断发展,往往需要进行微量快速的液体流量检测.本文设计了一种基于压差原理,通过测量液体流过精密微流量通道产生的压差实现流速快速测量的集成高速微流量传感器,并用MEMS技术进行本体结构和微流体通道的制作.通过理论计算以及传感器静态和动态建模分析,指出了结构尺寸设计原则,为结构设计提供理论依据,保证了传感器微量快速检测性能的实现.最后通过有限元分析软件对流量传感器结构尺寸进行受力和变形分析,并利用集总建模分析方法,对传感器进行动态特性分析.分析表明传感器在最大系统压力下变形和应力符合要求,响应速度可以达到1KHz以上,具有响应时间短,结构紧凑,功耗小的特点,特别适合于高通量自动化微量试剂操作系统中微流量的快速测量.
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