基于MEMS技术的微型磁通门式磁敏感器是磁场测量技术和微机电系统(MEMS)技术交叉研究领域的一个热点,在航空航天领域特别是在纳型/皮型卫星技术中有着重要的应用.本文介绍了该类磁敏感器所运用的磁通门效应的原理.从磁芯、线圈和整体结构布局等方面分析了现有的各种微型磁通门式磁敏感器的结构特征.并依据磁通门原理和各种微型磁通门式磁敏感器的结构特点,设计了一种两轴微型磁通门式磁敏感器.这种新型的磁敏感器具有对称结构、闭合磁路、差动形式、柔性连接等显著特点.
参考文献
| [1] | Rikpa P .New direcrtions in fluxgate sensor8[J].Journal of Magnetism and Magnetic Materials,2000,215-216:735-739. |
| [2] | 许晖,宋绍忠,石秀华.磁通门罗盘的设计[J].仪表技术,2002(05):47-48. |
| [3] | 吴美平,田菁,胡小平.三轴磁强计轨道确定[J].国防科技大学学报,2002(03):90-93. |
| [4] | Liakopoulos T M;Alan C H .A micro-fluxgate magnetic sensor using micromachined planar solenoid coils[J].Sensots and Actuators A,1999,77:66-72. |
| [5] | Kawahito S .A fluxgate magnetic sensor with micro-sole-noids and electroplated permalloy cores[J].Sensors and Actuators A-Physical,1994,A43:128-134. |
| [6] | Kawahito S .Hiigh-Resloution Micro-Fluxgate Sensing Elements Using Closely Coupled Coil Structures[J].Sensors and Actuators A-Physical,1996,A54(1-3):612-617. |
| [7] | Gottfried-Gottfried R .A miniaturized magnetic-field sensor system consisting of planar fluxgate sensor and a CMOS readout[J].Sensors and Actuators A-Physical,1996,66:443-447. |
| [8] | H. Gruger;R. Gottfried-Gottfried .Performance and applications of a two axes fluxgate magnetic field sensor fabricated by a CMOS process[J].Sensors and Actuators, A. Physical,2001(1/2):61-64. |
| [9] | Seits T .Fluxgate sensor in planar micro-technology[J].Sensors and Actuators A-Physical,2000,A21-A23:799-802. |
| [10] | P. Ripka;S. Kawahito;S. O. Choi;A. Tipek;M. Ishida .Micro-fluxgate sensor with closed core[J].Sensors and Actuators, A. Physical,2001(1/2):65-69. |
| [11] | Primdahl F .The fluxgate magnetometer[J].Journal of Phys E:Sci lnstrum,1979,12:241-253. |
| [12] | 张学孚;陆怡良.磁通门技术[M].北京:国防工业出版社,1995 |
| [13] | Chiesi L.;Janossy B.;Popovic RS.;Kejik P. .CMOS planar 2D micro-fluxgate sensor[J].Sensors and Actuators, A. Physical,2000(1/3):174-180. |
| [14] | Kejik P.;Janossy B.;Popovic RS.;Chiesi L. .A new compact 2D planar fluxgate sensor with amorphous metal core[J].Sensors and Actuators, A. Physical,2000(1/3):180-183. |
| [15] | Jae Yeong Park;Mark G. Allen .Integrated Electroplated Micromachined Magnetic Devices Using Low Temperature Fabrication Processes[J].IEEE transactions on electronics packaging manufacturing: A publication of the IEEE Components, Packaging, and Manufacturing Technology Society,2000(1):48-55. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%