Ba0.6 Sr0.4 TiO3溅射靶材的烧制和性能分析

1.南京电子器件研究所,南京,210016

2.南京电子器件研究所,南京,210016;单片集成电路与模块国家级重点实验室南京,210016

3.南京电子器件研究所,南京,210016

基金项目: 国家重点实验室基金(9140C1405020607)

Fire process and performance analysis of High-intensity Bao0.6 Sr0.4 TiO3 target

介绍了BST压电陶瓷靶的烧制方法,使用添加剂改善了Ba0.6 Sr0.4 TiO3 靶材的结构和性能,解决了BST靶材热稳定性差的问题,同时优化了BST靶材的晶化效果,提高介电性能.实验通过XRD衍射和P-E试验分析了所制BST溅射靶的微结构和铁电特性.

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