本研究在硅片上制作了有平面电极的微型电液动力泵并进行了实验研究.微泵由一组平面电极组成,施加直流电压驱动液体流动.分别采用HFE7100和无水乙醇作为工作流体进行了静压头测试.使用HFE7100时最高可以得到1050Pa的压头.
参考文献
[1] | Stuetzer O M .Ion drag pressure generation[J].Journal of Applied Physics,1959,30(07):984-994. |
[2] | Stuetzer O M .Ion drag pumps[J].Journal of Applied Physics,1960,31(01):136-146. |
[3] | Pickard W F .Ion drag pumping:I Theory[J].Journal of Appl,1962,34(02):246-250. |
[4] | Pickard W F .Ion drag pumping:ⅡExperiment[J].Journal of Applied Physics,1963,34(02):251-258. |
[5] | Richter A;Plettner A .An electrohydrodynamic micropump[J].Sensors and Actuators A-Physical,1991,29:159-168. |
[6] | Si-Hong Ahn;Yong-Kweon Kim .Fabrication and experiment of a planar micro ion drag pump[J].Sensors and Actuators, A. Physical,1998(1/3):1-5. |
[7] | Jeff Darabi;Mihai Rada;Michael Ohadi;John Lawler .Design, fabrication, and testing of an electrohydrodynamic ion-drag micropump[J].Journal of Microelectromechanical Systems: A Joint IEEE and ASME Publication on Microstructures, Microactuators, Microsensors, and Microsystems,2002(6):684-690. |
[8] | Crowley J.M.;Wright G.S. .Selecting a working fluid to increase the efficiency and flow rate of an EHD pump[J].IEEE Transactions on Industry Applications,1990(1):42-49. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%