采用电沉积-硫化法制备了CuInS2(CIS)薄膜.用X射线衍射仪(XRD)、原子力显微镜(AFM)和能谱仪(EDS)等实验手段对CIS薄膜的晶体结构、形貌和组分进行了表征.结果表明:在500～560℃硫化温度范围内制备的CIS薄膜表面均生成金属性CuxS二元相,后续的KCN刻蚀处理CuxS二元相可去除.硫化温度为540℃制得的CIS薄膜高质量结晶、具有[112]择优取向,适合于制备CIS薄膜太阳能电池吸收层.
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