介绍了软X射线光栅分束镜Mach-Zehnder干涉等离子体诊断系统调整用双频光栅线条平行度的衍射法测量系统.该系统主要由激光器,准直镜,待测光栅,精密转台(含角度测量仪),直线工作台,光栅调节架和探测器组成.分析了系统中各种误差对测量精度的影响其中包括距离测量误差、波长误差、光栅准直误差即光栅刻线与入射光和反射光组成的平面不垂直、光栅转动过程的误差、光栅表面面型误差、探测器误差,经计算得到系统的绝对误差为minute.计算表明,该系统的测量精度满足软X射线Mach-Zehnder干涉系统对双频调整光栅的性能要求.
We present new progress in the diffraction grating interferometer being pre-aligned used a double frequency grating. To measure the parallelism of the double frequency grating to a nicety before built in the interferometer, a device based on Diffraction Technique for measuring the parallelism of the double frequency grating is designed. It is built of a semiconductor laser, a collimator, gratings, a preci-sion tumplate, a beeline workbench, a redressal shelves, a ccd detector. The system error of the device is analyzed in this paper, and the parallelism of the double frequency grating is measured by this device. The results demonstrate that the diffraction measuring device suits the parallelism measured the diffraction grat-ing interferometer based on the double frequency grating of that parallelism can attain a high pre-aligning precision.
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