采用溶胶-凝胶法,研究了两种在Au/Cr/SiO2/Si基底上沉积PZT(Pb(Zr0.52Ti0.48)O3)厚膜的方法.把与PZT澄清溶胶成分相同的PZT纳米粉混入澄清PZT溶胶,然后超声混合形成PZT浆料,PZT纳米粉的粒径为50～100nm.XRD分析表明两种方法得到的PZT厚膜都获得了单相钙钛矿结构.SEM结果显示两种厚膜厚度大约4μm,第一种旋涂方法制得的PZT厚膜表面粗糙,第二种旋涂方法制得的厚膜表面致密,无裂纹.在1 kHz的测试频率下,第一种和第二种厚膜的矫顽场分别为30 kV/cm和50 kV/cm,饱和极化分别为45 μC/cm2和54 μC/cm2,剩余极化分别为25μC/cm2 and 30μC/cm2.第二种厚膜有较高的直流耐压性能,在300 kV/cm的电场下,仍然保持较好的铁电性能.因而,第二种旋涂方法能够改善PZT厚膜的表面形貌和铁电性能.
Two spin - coating methods of depositing PZT (Pb (Zr0.52Ti0.48)O3) thick film on Au/Cr/SiO2/Si substrate by sol -gel have been investigated in this paper. PZT nanopowder which is identical with the PZT clear sol in composition dispersed into PZT clear sol and mixed by ultrasonic processing obtained PZT sol suspension,the grain size of PZT nanopowder is approximately 50～100 nm. The XRD analysis indi-cates that the both thick films possess single perovskite phase structure. The SEM micrographs show that the surface of first thick film is coarse and the second thick film is dense,uniform and crack -free. Their thicknesses are both about 4 μm. The ferroelectric hysteresis loops of beth PZT thick films,which were tested under the frequency of 1 kHz,show that they have the coercive field of 30 kV/cm and 50 kV/cm,the saturation polarization of 45 μC/cm2 and 54 μC/cm2,the remnant polarization of 25 μC/cm2 and 30 μC/cm2,respectively,the second thick film has higher direct current compression resistant properties,keeps good ferroelectric properties under electric field intensity of 300 kV/cm. Thus,the second spin -coating method could improve the surface morphology and the ferroelectric properties of PZT thick film.
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