利用全息曝光方法制备了分布反馈量子级联激光器的光栅掩模,选择和发展了恰当的用于InGaAs/InP材料的光栅腐蚀优化工艺,得到腐蚀规律,讨论了腐蚀机制.在量子级联激光器的In-GaAs/InP层上制备光栅得到分布反馈量子级联激光器,其单模特性较好,信噪比大于30dB.
In this paper, first order gratings for InP based distributed feedback quantum cascade lasers ( DFB - QCL) were fabricated by holographic lithography and wet chemical etching. The etching process was optimized for small patterns and good grating profiles. DFB QCL operating at room temperature in pulsed mode was demonstrated with a high side mode suppression ratio of about 30dB. The device results indicate the high quality of gratings.
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