本文主要研究了在常态(常温、常压等)条件下,利用金属催化化学腐蚀方法在硅片表面上大面积制备排列整齐、取向一致的硅纳米线阵列.同时,出于对后续制作硅纳米线传感器考虑,利用微电子标准加工工艺,以氮化硅做掩膜,通过选择合适的实验参数,在硅片表面选择性生长纳米线阵列,得到图形化的硅纳米线阵列.
Preparation of large area aligned identical silicon nanowires arrays by the metal catalyzed chemical etching method under normal conditions(room temperature,1 atm)had been studied in this paper.And,in consideration of further silicon nanowires sensors,using a standard microelectronic process technique,silicon nitride as mask,selective silicon nanowires on the silicon substrate were grown.Finally,patterned silicon nanowires arrays were gotten.
参考文献
| [1] | Morales A M;Lieber C M .A laser ablation method for the synthesis of crystalline semiconductor nanowires[J].Science,1998,279:208-211. |
| [2] | Tang Y H;Zhang Y F;Lee C S et al.Large scale synthesjs of silicon nanowires by laser ablation[J].Materials Research Society Symposium Proceedings,1998,526:73-77. |
| [3] | Zhang YF.;Wang N.;Yu DP.;Lee CS.;Bello I.;Lee ST.;Tang YH. .Silicon nanowires prepared by laser ablation at high temperature[J].Applied physics letters,1998(15):1835-1837. |
| [4] | Yu DP.;Bello I.;Sun XS.;Tang YH.;Zhou GW.;Bai ZG.;Zhang Z. Feng SQ.;Lee CS. .Synthesis of nano-scale silicon wires by excimer laser ablation at high temperature[J].Solid State Communications,1998(6):403-407. |
| [5] | Lee S T;Wang N;Zhang Y F et al.Oxide-assisted semieonductor nanowire growth[J].MRS Bulletin,1999,24:36-42. |
| [6] | Dai H J;Wang E W;Lu Y Z et al.Synthesis and characterization of carbide nanorods[J].Nature,1995,375:769-772. |
| [7] | Y. Zhang;K. Suenaga;C. Colliex;S. Iijima .Coaxial Nanocable: Silicon Carbide and Silicon Oxide Sheathed with Boron Nitride and Carbon[J].Science,1998(5379):973-975. |
| [8] | Zhou X T;Wang N;Lai H L;Peng H Y et al.B-SiC nanorods synthesized by hot filament chemical vapor deposition[J].Applied Physics Letters,1999,74(26):3942-3944. |
| [9] | Han W Q;Fan S S;Li Q Q et al.Synthesis of gallium nitilde nanorods through a carbon nanotube-confined Reaction[J].Science,1997,277:1287-1289. |
| [10] | Sung-Wook Chung;Jae-Young Yu;James R. Heath .Silicon nanowire devices[J].Applied physics letters,2000(15):2068-2070. |
| [11] | Zeng X B;Xu Y Y;Zhang S B et al.Silicon nanowires growth on a pre-annealed Si substrate[J].Journal of Crystal Growth,2003,247(01):13-16. |
| [12] | Bogaerts W.;Baets R.;Dumon P.;Wiaux V.;Beckx S.;Taillaert D.;Luyssaert B.;Van Campenhout J.;Bienstman P.;Van Thourhout D. .Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology[J].Journal of Lightwave Technology: A Joint IEEE/OSA Publication,2005(1):401-412. |
| [13] | S Ciucci;F D Angelo;A Diligenti;B Pellegrini et al.Silicon nanowires fabricated by means of underetching technique[J].Micruelectronic Engineering,2005,78-79:338-342. |
| [14] | Cui Y;Zhong Z H;Wang D L et al.High perfurmance silicon nanowire field effect transistors[J].Nano Letters,2003,3(02):149-152. |
| [15] | Yu DP.;Hang QL.;Yan HF.;Xu J.;Xi ZH.;Feng SQ.;Xing YJ. .Controlled growth of oriented amorphous silicon nanowires via a solid-liquid-solid (SLS) mechanism[J].Physica, E. Low-dimensional systems & nanostructures,2001(2):305-309. |
| [16] | Kui-Qing Peng;Yun-Jie Yan;Shang-Peng Gao;Jing Zhu .Synthesis of Large-Area Silicon Nanowire Arrays via Self-Assembling Nanoelectrochemistry[J].Advanced Materials,2002(16):1164-1167. |
| [17] | Peng K Q;Zhu J .Sin-uhaneous gold deposition and formation of silicon nanowire arrays[J].Journal of Electroanalytieal Chemistry,2003,558:35-39. |
| [18] | Wan L J;Gong W L;Jiang K W et al.Prearation and surface modification of silicon nanowire8 under normal condition[J].Aplied Surface Science,2008,254(15):4899-4907. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%