为了能利用半导体材料ZnO对光谱曲线随温度变化而移动的原理设计一种光纤温度传感器,因此有必要对生长在光纤端面上的ZnO材料的温变特性的进行研究.基于ZnO材料的测温原理,利用电子束蒸发技术在蓝宝石光纤端面上生长ZnO薄膜,并设计了一种具有低插入损耗的光纤检测系统用于光学性能的分析.光谱测试结果显示,蒸镀在蓝宝石光纤端面上的ZnO薄膜具有陡峭的光学吸收边,随着温度的升高(室温～450℃),ZnO薄膜的禁带宽度减小,吸收边向长波长方向移动,符合半导体材料的温变特性.同时随着温度的升高,平均的透射率有一定的减小.ZnO薄膜温变特性的研究,将为进一步研制以ZnO镀膜为敏感材料的新型光纤温度传感器打下良好的基础.
参考文献
| [1] | 关荣峰;叶嘉雄;印新达 等.半导体光纤温度传感器特性研究[J].光电工程,1997,24(02):5-54. |
| [2] | Kong BH;Mohanta SK;Kim DC;Cho HK .Optical and structural properties of ZnO thin films grown on various substrates by metalorganic chemical vapor deposition[J].Physica, B. Condensed Matter,2007(0):399-403. |
| [3] | S. Mandal;R.K. Singha;A. Dhar S.K. Ray .Optical and structural characteristics of ZnO thin films grown by rf magnetron sputtering[J].Materials Research Bulletin: An International Journal Reporting Research on Crystal Growth and Materials Preparation and Characterization,2008(2):244-250. |
| [4] | Jebreel M. Khoshman;Martin E. Kordesch .Optical constants and band edge of amorphous zinc oxide thin films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2007(18):7393-7399. |
| [5] | Nemeth A;Horvath E;Labadi Z;Fedak L;Barsony I .Single step deposition of different morphology ZnO gas sensing films[J].Sensors and Actuators, B. Chemical,2007(1):157-160. |
| [6] | Ge Chunqiao;Bai Zikui;Hu Mulin et al.Preparation and gas-sensing property of ZnO nanorod-bundle thin films[J].Materials Letters,2008,62(15):2307-2310. |
| [7] | N.W. Emanetoglu;C. Gorla;Y. Liu;S. Liang;Y. Lu .Epitaxial ZnO Piezoelectric thin films for saw filters[J].Materials science in semiconductor processing,1999(3):247-252. |
| [8] | Chang CC.;Fang SK. .A study of the design of ZnO thin film pressure sensors[J].International Journal of Electronics: Theoretical & Experimental,2000(8):1013-1023. |
| [9] | 王廷云,罗承沐,申烛.半导体吸收式光纤温度传感器[J].清华大学学报(自然科学版),2001(03):59-61. |
| [10] | Mingsong Wang;Eui Jung Kim;Jin Suk Chung;Eun Woo Shin;Sung Hong Hahn;Ka Eun Lee;Chinho Park .Influence of annealing temperature on the structural and optical properties of sol-gel prepared ZnO thin films[J].Physica Status Solidi, A. Applied Research,2006(10):2418-2425. |
| [11] | K.J. Hong;T.S. Jeong .Growth and optical absorption spectra of ZnO films grown by pulsed laser deposition[J].Journal of Crystal Growth,2005(3/4):545-550. |
| [12] | Sui CH;Naibo CB;Xu XJ;Wei GY;Cai PG;Zhou H .High-temperature-dependent optical properties of ZnO film on sapphire substrate[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2008(6):1137-1141. |
| [13] | Bai SN;Tseng TY .Effect of alumina doping on structural, electrical, and optical properties of sputtered ZnO thin films[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2006(3):872-875. |
| [14] | Chen X;Guan WJ;Fang GJ;Zhao XZ .Influence of substrate temperature and post-treatment on the properties of ZnO : Al thin films prepared by pulsed laser deposition[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2005(5):1561-1567. |
| [15] | Bouhssira N;Abed S;Tomasella E;Cellier J;Mosbah A;Aida MS;Jacquet M .Influence of annealing temperature on the properties of ZnO thin films deposited by thermal evaporation[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2006(15):5594-5597. |
| [16] | 周红,隋成华,陈乃波,许晓军,魏高尧,蔡萍根.在蓝宝石光纤端面上生长ZnO薄膜的方法及光学性能分析[J].功能材料与器件学报,2008(04):729-734. |
| [17] | Z.B. Fang;Y.S. Tan;H.X. Gong .Transparent conductive Tb-doped ZnO films prepared by rf reactive magnetron sputtering[J].Materials Letters,2005(21):2611-2614. |
| [18] | 刘恩科;朱秉升;罗晋生.半导体物理学[M].西安:西安交通大学出版社,1998:266-273. |
| [19] | Lee JK.;Kim HM.;Park SH.;Kim JJ.;Rhee BR.;Sohn SH. .Heat treatment effects on electrical and optical properties of ternary compound In2O3-ZnO films[J].Journal of Applied Physics,2002(10):5761-5765. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%