在CdZnTe表面采用真空蒸镀制备了Au和Al电极,研究了在N2氛围退火对Al/CdZnTe接触特性的影响.退火温度在100℃到300℃之间变化,退火时间为5 min.采用Agilent4155c半导体测试仪测试了样品在不同温度退火后的I-V特性.采用Agilent 4294A高精度阻抗分析仪测试了样品在不同温度退火后的C-V特性.I-V和C-V曲线表明,低温退火会使接触势垒高度增加,理想因子趋近于1,电容值下降为退火前的一半左右.当退火温度高于250℃时,接触势垒高度下降,理想因子偏离1,电容值下降近一个数量级.
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