采用射频磁控溅射技术在ITO导电玻璃上沉积了Bi2O3薄膜,利用X射线衍射仪、原子力显微镜、X射线光电子谱对薄膜的微结构、表面形貌、成分和价态进行了表征.分析表明在空气气氛中350℃热处理的Bi2O3薄膜具有四方结构,属β-Bi2O3,该薄膜在-1.8-+3V的直流电压驱动下具有在透明和暗棕色之间转换的电致变色性能,着色和漂白过程中均没有其他价态(+3价以外)的Bi生成.研究发现Bi2O3薄膜在400-800nm的可见光波段平均透射率调制幅度可达44%,550nm处着色系数为9.6cm2/C,该材料具有优良的电致变色性能.
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