近年来基于铁电聚合物的柔性存储器件的研制受到了越来越多的关注.铁电聚合物柔性应用的关键因素之一,在于基板弯对其电学性产生多大程度的影响,但迄今这方面的研究较少.本文研究了柔性基板弯曲对铁电聚合物薄膜电学性能的影响,通过对铁电电容结构的表征,确定了基板弯曲对铁电膜矫顽场、剩余极化、电学保持能力、电学疲劳特性和漏电流特性的影响.研究表明,在本文实验条件下基板不会对铁电聚合物的电学性能产生影响.
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