在氨水催化水解正硅酸乙酯(TEOS)过程中,采用一种新方法制备了单分散的超小粒径氧化硅.加入聚乙烯吡咯烷酮(PVP)能够有效的减小氧化硅颗粒的粒径大小,氧化硅粒径随着PVP的增加而减小.通过优化工艺参数,制备得到了单分散的、粒径只有11nm的氧化硅颗粒.而且,在相同的反应体系中,所制备的氧化硅颗粒能够作为晶种再次生长,通过滴加不同浓度的TEOS能够得到粒径大小可控的氧化硅颗粒.
参考文献
| [1] | Yuling Liu;Kailiang Zhang;Fang Wang;Weiguo Di .Investigation on the final polishing slurry and technique of silicon substrate in ULSI[J].Microelectronic engineering,2003(1/4):438-444. |
| [2] | 张楷亮,宋志棠,张建新,檀柏梅,刘玉岭.ULSI介质CMP用大粒径硅溶胶纳米研磨料的合成及应用研究[J].电子器件,2004(04):556-558,563. |
| [3] | Matijevic E;Babu SV .Colloid aspects of chemical-mechanical planarization[J].Journal of Colloid and Interface Science,2008(1):219-237. |
| [4] | Ming-Shyong Tsai .The study of formation colloidal silica via sodium silicate[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,2004(issue 1):52-55. |
| [5] | Ming-Shyong Tsai;Po Yuan Huang;Wen-Chang Wu .The study of formation process of colloidal silica[J].Materials Research Bulletin: An International Journal Reporting Research on Crystal Growth and Materials Preparation and Characterization,2005(9):1609-1616. |
| [6] | St(O)ber W;Fink A;Bohn E .Controlled growth of monodisperse silica spheres in the micron size range[J].Journal of Colloid and Interface Science,1968,26(01):62-69. |
| [7] | Arriagada F J;Osseo-Asare K .Synthesis of nanosize silica in a nonionic water-in-oil microemulsion:Effects of the water/surfactant molar ratio and ammonia concentration[J].Journal of Colloid and Interface Science,1999,211(02):210-220. |
| [8] | Finnie KS;Bartlett JR;Barbe CJA;Kong LG .Formation of silica nanoparticles in microemulsions[J].Langmuir: The ACS Journal of Surfaces and Colloids,2007(6):3017-3024. |
| [9] | Toshiyuki Yokoi;Yasuhiro Sakamoto;Osamu Terasaki .Periodic Arrangement of Silica Nanospheres Assisted by Amino Acids[J].Journal of the American Chemical Society,2006(42):13664-13665. |
| [10] | Hartlen KD;Athanasopoulos APT;Kitaev V .Facile preparation of highly monodisperse small silica spheres (15 to > 200 nm) suitable for colloidal templating and formation of ordered arrays[J].Langmuir: The ACS Journal of Surfaces and Colloids,2008(5):1714-1720. |
| [11] | Tracy M.Davis;Mark A.Snyder;John E.Krohn .Nanoparticles in Lysine-Silica Sols[J].Chemistry of Materials: A Publication of the American Chemistry Society,2006(25):5814-5816. |
| [12] | Dong Shin Yun;Hyeong-Seok Lee;Ho Gyeom Jang .Controlling Size and Distribution for Nano-sized Polystyrene Spheres[J].Bulletin of the Korean Chemical Society,2010(5):1345-1348. |
| [13] | Du X;He JH .Facile size-controllable syntheses of highly monodisperse polystyrene nano- and microspheres by polyvinylpyrrolidone-mediated emulsifier-free emulsion polymerization[J].Journal of Applied Polymer Science,2008(3):1755-1760. |
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