本文回顾了前人有关脉冲激光烧蚀过程的各种理论模型,重点综述了脉冲激光烧蚀金属氧化物的物理化学过程及反应机理,并对激光能量不很高时金属氧化物的烧蚀过程提出了热控制机制的新观点.
参考文献
[1] | Chrisey D B,Graham K.Pulsed Laser Deposition of Thin Films [M].Chapter 1 "History and Fundamentals of Pulsed Laser Deposition ",Cheung J T,Hubler ed.New York:John Willey & Sons,Inc.,1994.1. |
[2] | Lowndes D H,Geohegan D B,et al.Synthesis of novel thin-film materials by pulsed laser deposition [J].Science,1996,273:898. |
[3] | Fu Z W,Chen N Y,et al.Tantalum oxide film deposition by UV laser ablation of metallic Ta in ozone ambient[J].Thin Solid Films,1999,340:164. |
[4] | Ding Fei,Fu Zhengwen,Qin Qizong.Electrochromic properties of ZnO thin films prepared by pulsed laser deposition [J].Electrochemical and Solid-State Lett.,1999,2(8):418-419. |
[5] | Rubin M,Wen S J,Richardson T,et al.Electrochromic lithium nickel oxide by pulsed laser deposition and sputtering [J].Solar Energy Materials and Solar Cells,1998,54:59-66. |
[6] | Chen L H,,Jin S,Tiefel T H,et al.Large magnetoresistance in La-Ca-Mn-O films [J].IEEE Trans.on Mag.,1995,31(6):3912. |
[7] | Nuli Yan-Na,Zhao Shengli,Qin Qizong.Nanorystalline tin oxides and nickel oxide film anodes for Li-ion batteries[J].Journal of Power Sources,2003,114:113-120. |
[8] | Fu Zhengwen,Huang Feng,Chu Yanqiu,et al.Characterization of amorphous Ta2O5 film as a novel anode material [J].J.Electrochem.Soc.,2003,150(6):776-782. |
[9] | Zhao Shengli,Qin Qizong.Li-V-Si-O thin film electrolyte for all-solid Li-ion battery [J].J.Power Soures,2003,122:174-180. |
[10] | Chu Yanqiu,Qin Qizong.Fabrication and characterization of silver-V2O5 composite thin films as lithium-Ion insertion materials [J].Chem.Mater.,2002,14:3152-3157. |
[11] | Huang Feng,Fu Zhengwen,Qin Qizong.A novel Li2Ag0.5V2O5 composite film cathode for all-solid-state lithium batteries [J].Electrochemistry Communications,2003,5:262-266. |
[12] | Chu Yanqiu,Huang Feng,Qin Qizong.A Study of pulsed laser deposited amorphous nickel-V2O5 composite film and its electrochemical properties [J].Chinese Journal of Chemical Physics (化学物理学报),2002,15(3):193-197(in Chinese). |
[13] | Zhang Wei,Fu Zhengwen,Qin Qizong.Manganese oxyiodide thin film electrodes prepared by pulsed laser reactive deposition [J].Eletrochemical and Solid-state Letters,2001,4(7):1518-1521. |
[14] | Chen K R,Leboeuf J N,Wood R F,et al.Mechanisms affecting kinetic energies of laser-ablated materials [J].J.Vac.Sci.Technol.,1996,14(3):111. |
[15] | Chen K R,Leboeuf J N,et al.Accelerated expansion of laser-ablated materials near a solid surface [J].Phys.Rev.Lett.,1995,75(25):4706. |
[16] | Richard F,Haglund Jr.Microscopic and mesoscopic aspects of laser induced desorption and ablation [J].Appl.Surf.Sci.,1996,96-98:1. |
[17] | Maham J E,Vantomme Andre.A simplified collisional model of sputtering in the linear cascade regime [J].J.Vac.Sci.Technol.,1997,15(4):1976. |
[18] | Zhigilie L V,Kodali P B S,Garrison B J.A microscopic view of laser ablation [J].J.Phys.Chem.B,1998,102:2845. |
[19] | Salvatore Amoruso.Modeling of laser produced plasma and time-of-flight experiments in UV laser ablation of aluminium targets [J].Appl.Surf.Sci.,1999,138-139:292-298. |
[20] | Von der Linde D,Sokolowski-Tinten K.The physical mechanisms of short-pulse laser ablation [J].Appl.Surf.Sci.,2000,154-155:1-10. |
[21] | Amoruso S,Wang X,Altucci Cisio,et al.Double-peak distribution of electron and ion emission profile during femtosecond laser ablation of metals [J].Appl.Surf.Sci.,2002,186:358-363. |
[22] | Gamaly E G,Rode A V,Tikhonchuk V T,et al.Electrostatic mechanism of ablation by femtosecond lasers [J].Appl.Surf.Sci.,2002,197-198:699-704. |
[23] | Craciun V,Bassim N,et al.Laser-induced explosive boiling during nanosecond laser ablation of silicon [J].Appl.Surf.Sci.,2002,186:288-292. |
[24] | Mendes M,Vilar R.Influence of the processing parameters on the formation and deposition of particles in UV pulsed laser ablation of Al2O3-TiC ceramics [J].Appl.Surf.Sci.,2003,217:146-162. |
[25] | Singh R K,Narayan J.Pulsed-laser evaporation technique for deposition of thin films:physics and theoretical model [J].Phys.Rev.B,1990,41(13):8843. |
[26] | Wood R F,Chen K R,Leboeuf J N,et al.Dynamics of plume propagation and splitting during pulsed laser ablation [J].Phys.Rev.Lett.,1997,79(8):1571. |
[27] | Yingling Y G,Garrison B J.Photochemical induced effects in material ejection in laser ablation [J].Chem.Phys.Lett.,2002,364:237-243. |
[28] | Leboeuf J N,Chen K R,Donato J M,et al.Modeling of dynamical processes in laser ablation [J].Appl.Surf.Sci.,1996,96-98:14. |
[29] | Qin Q Z,Han Z H,Dang H J.An angle-resolved time-of-flight mass spectrometric study of pulsed laser ablation of Ta2O5 [J].J Appl.Phys.,1998,83(11):6082. |
[30] | Dang H J,Qin Q Z.Velocity distributions of laser-ablated species from a La0.67Ca0.aaMnOa target [J].Appl.Surf.Sci.,1999,151(3-4):180-188. |
[31] | Tang Y X,Dang H J,Zhang Z J,et al.A Quadrupole mass-spectrometric study on pulsed-laser ablation of Y1Ba2Cu3O7_δ [J].Chemical Journal of Chinese Universities (高校化学学报),1999,20(2):286-288 ( in Chinese). |
[32] | Dang H J,Zhou M F,Qin Q Z.Optical emission spectrometric characterization of plumes generated from laser ablated Pr0.67Sr0.33MnO3 [J].Appl.Surf.Sci.,1999,140:118. |
[33] | Zhao Shengli,Liu Xiannian,et al.Time of flight spectra of species ablated from LiMn2O4 by 355 nm laser [J].Science in China (B) (中国科学(B)),2002,32(5):406-412 (in Chinese). |
[34] | Tang Yongxin,Qin Qizong.Mass,velocity and angular distributions of the species ejected from laser ablation of LiCoO2 [J].Chemical Physics Lett.,2001,343:452-457. |
[35] | Peugnet C.Kinetic temperature measurement of the front surface of a target exposed to an intense pulsed electron beam [J].J.Appl.Phys.,1977,48(8):3206. |
[36] | Dang Haijun,Qin Qizong.A thermal-controlling mechanism for laser ablation of a colossal magnetoresistant oxide target [J].Chemical Physics Lett.,2002,354:210-216. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分:
-
10%
-
20%
-
30%
-
40%
-
50%