自行研制紫外微加工系统,系统有效工作范围120 mm×120 mm,最小加工线宽80 μm,系统操作简单、运行稳定高效.实验中完成对Nd:YAG紫外激光器、XY扫描振镜以及F-Theta平场透镜设计.实现波长355 nm紫外激光最高平均功率2.13 W稳定输出,1 h内输出功率波动小于7%;XY振镜最大扫描角度+28°,线性响应速度0.35～0.5 ms;F-Theta视场角为±25°,有效焦距为250 mm.最后对系统存在的问题进行了分析.
参考文献
| [1] | Wang Xinkui,Wu Dan,Lin Chengying.Review on precision and superprecision processing technique[J].China Mechanical Engineering(中国机械工程),1999,5(5):(in Chinese). |
| [2] | Jia Wei,Wang Qingyue,Fu Xing,et al.Progress of femtosecond laser micromachining[J].Chinese Journal of Quantum Electronics(量子电子学报),2004,21(2):194-201(in Chinese). |
| [3] | Jiang Heihe.Development and forecast of the laser processing technology application[J].Optoelectronic Technology and Information(光电子技术与信息),2001,14(4):1-12(in Chinese). |
| [4] | Lin Shuzhong,Sun Huilai.Application and development of laser manufacturing technology[J].Journal of Hebei University of Technology(河北工业大学学报),2004,33(2):77-82(in Chinese). |
| [5] | Li Yan,Jiang Hongbing,Yang Hong,et al.Three-dimensional microfabrication in transparent materials with femtosecond laser pulses[J].Chinese Journal of Quantum Electronics(量子电子学报),2004,24(2):188-193(in Chinese). |
| [6] | Stuart B C,Feit M,Herman S,et al.Nanosecond to femtosecond laser-induced breakdown in dielectrics[J].Phys.Rev.B,1996,53(4):1749-1761. |
| [7] | Niu Jiading,Xu Wenjuan,Mou Tongsheng.Optoelectronic Technology(光电技术)[M].Hangzhou:Zhejiang University Press,2002,70-92(in Chinese). |
| [8] | Gonsc M,Lou Qihong.Mirco-processing using UV laser[J].High Power Laser Technology and Development(强激光技术进展),1996,6(4):42-46(in Chinese). |
| [9] | Liu Ping.The advantage of ultraviolet laser micro-processing[J].OME Information(光机电信息),2004,1:8-10(in Chinese). |
| [10] | Deng Shusheng.Present state and perspectives of our country's laser processing industry[J].Laser Technology and Application(激光技术与应用),2007,24(2):19-20(in Chinese). |
| [11] | Yuan Yaping.Nd:YAG laser marking system and technical research by using vector scanning method[J].Aeronautical Manufacturing Technology(航空制造技术),1999,S1:11-16(in Chinese). |
| [12] | Ji Yiqun,Liu Hongjun,Shen Weimin.Optical design of F-θ lens[J].Acta Photonica Sinica(光子学报),2007,36(1):73-76(in Chinese). |
| [13] | Zhang Yi-mo.Applied Optics(应用光学)[M].Tianjin:Mechanical Industry Press,1982.120-295(in Chinese). |
| [14] | Ji Yiqun,Shen Weimin.Optical design of large working area F-Theta lens[J].Acta Optica Sinica(光学学报),2005,25(11):1539-1543(in Chinese). |
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