脉冲升压式准分子激光电源研究

1.中国科学院安徽光学精密机械所,安徽,合肥,230031

2.中国科学院安徽光学精密机械所,安徽,合肥,230031

3.中国科学院安徽光学精密机械所,安徽,合肥,230031

4.中国科学院安徽光学精密机械所,安徽,合肥,230031

Research on pulse charging excimer laser power supply

针对光刻用准分子激光器的激励技术,利用拉普拉斯变换方程对脉冲变压器高压充电过程进行了分析,验证了耦合系数于与压缩高压充电时间的重要作用.耦合系数越接近于1,高压充电时间越短.介绍了充电电路与磁开关结合后完成快放电的过程,并提出了一种控制谐振充电的方法.实现了对高压电容50μs内的快充电.

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