应用ATLAS模拟软件,设计了吸收层与倍增层分离的(SAM)4H-SiC雪崩光电探测器(APD)结构.分析了不同外延层厚度和掺杂浓度对器件光谱响应的影响,对倍增层参数进行优化模拟,得出倍增层的最优化厚度为0.26 μm,掺杂浓度为9.0×1017 cm-3.模拟分析了该APD的反向IV特性、光增益、不同偏压下的光谱响应和探测率等,结果显示该APD在较低的击穿电压-66.4 V下可获得较高的倍增因子105；在0V偏压下峰值响应波长(250 nm)处的响应度为0.11A/W,相应的量子效率为58％；临近击穿电压时,紫外可见比仍可达1.5×103；其归一化探测率最大可达1.5×1016 cmHz1/2W-1.结果显示该APD具有较好的紫外探测性能.
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