为了研究脉冲激光沉积法中衬底温度和距离对类金刚石薄膜的影响,首先温度保持在200℃,靶和衬底间的距离分别取25.0 mm和30.0 mm来沉积类金刚石膜.其次温度保持在400℃,距离分别取25.0 mm和30.0 mm来沉积类金刚石膜.用Raman光谱仪对薄膜的微观结构进行检测,用原子力显微镜对薄膜的表面形貌进行检测.实验结果表明:距离增加或者温度升高都会导致类金刚石薄膜的密度和sp3/sp2的比值减小,薄膜中石墨晶粒的数量增多和体积增大.近距离时温度的变化和低温时距离的变化对薄膜微观结构产生的影响更明显.距离和温度的变化对类金刚石薄膜的表面形貌也产生显著的影响.
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