实用型大能量高功率准分子激光器广泛地应用于材料的加工及表面处理,介绍了其在液晶平板显示行业、太阳能光伏行业、半导体行业及汽车制造业的应用.分析了大能量高功率准分子激光器的关键技术,如大面积均匀放电技术,预电离技术,高压快脉冲激励技术以及为了得到更大的脉冲能量及功率输出而采用的双腔同步技术.
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