利用脉冲电弧放电在大气压下产生的高密度等离子体研究了结晶氮化碳薄膜的低温合成.直流脉冲电弧等离子体由甲醇/氨水溶液液滴通过高压电极时诱导放电产生.利用扫描电子显微镜、X射线衍射、Raman光谱分析了薄膜样品的形貌和结构.在基片温度为450 ℃时所制样品的X射线衍射分析表明薄膜中含有α-C3N4和β-C3N4两种结构晶体,Raman光谱给出了明显的特征峰,这些特征峰与氮化碳晶体的理论预言值符合较好.当基片温度提高到550 ℃时,Raman光谱分析表明,样品为炭膜.
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