应用动态膜技术回收半导体厂晶片切割废水,研究了动态膜的形成条件及其水处理效果.通过恒压过滤形成动态膜:恒压过滤压差5 kPa,曝气强度10 L/min,过滤高浓度(TS＝1 800 mg/L)含硅废水,形成了均匀而阻力较小的动态膜;之后在一定的过滤运行条件下,研究膜过滤低浓度晶片切割废水的运行周期和水处理效果:要处理的废水TS(总固形物)=40mg/L,恒速过滤滤速为0.6 m/d,曝气量为15 L/min.结果表明:该动态膜可保护基膜不被污染,维持较长的过滤周期,稳定运行时间达260～360 h.膜过滤单元中的TS(总固形物)可被浓缩达到1 200 mg/L.动态膜对原水浊度、TS的去除效果很好,产水水质稳定,浊度为0.14NTU,TS几乎为0,SDI15为0.5,电导率为12μS/cm,满足反渗透深度处理的进水要求.当压力上升至14 kPa时,排出浓缩液、用产水冲刷清洗基膜表面的滤饼层,以回收高纯硅,同时基膜经过擦洗后通量可以完全恢复.
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