长期以来,高质量的纯类金刚石薄膜的成功制备一直受其巨大内部压应力的阻碍,因为这种压应力导致严重的附着问题.厚度大于500nm的类金刚石薄膜中的压应力常使薄膜与基体剥离.作者采用功能梯度的设计概念,应用准分子脉冲激光沉积方法,成功制备了厚度超过1.0μm的高质量类金刚石薄膜.薄膜中的SP3碳原子含量超过60%.纳米硬度测试表明,薄膜的弹性模量高达500GPa,纳米硬度高达60GPa,薄膜与基体间附着良好.证明功能梯度的设计概念可以用于制备较厚的超硬类金刚石薄膜.
参考文献
| [1] | Lifshitz Y;Paoletti A;Tucciarone A.In the Physics of Diamond[J].Italian Phy Soc,1997:209. |
| [2] | Bozhko A;Ivanov A.[J].Diamond and Related Materials,1995(04):488. |
| [3] | Milne W J .[J].Journal of Non-Crystalline Solids,1996,198-200:605. |
| [4] | Robertson J .[J].Progress in Solid State Chemistry,1991,21:199. |
| [5] | Nir D .[J].Thin Solid Films,1987,146:27. |
| [6] | Friedmann TA;Sullivan JP;Knapp JA;Tallant DR;Follstaedt DM;Medlin DL;Mirkarimi PB;Sandia Natl Labs Livermore CA 94551 USA. .Thick stress-free amorphous-tetrahedral carbon films with hardness near that of diamond[J].Applied physics letters,1997(26):3820-3822. |
| [7] | Ferrari A C;Kleinsorge B;Morrison N A et al.[J].Applied Journal of Phys,1999,85:7191. |
| [8] | Wei Q;Narayan R J;Sharma A K et al.[J].J Vac Sci Technol,1999,A17:3406. |
| [9] | Ferrari A C;Robertson J;Beghi M G et al.[J].Applied Physics Letters,1999,75:1893. |
| [10] | He H;Thorpe M E .[J].Physical Review Letters,1985,54:2107. |
| [11] | Kelires P C .[J].Physical Review Letters,1994,73:2460. |
| [12] | Wei Q;Narayan R J;Narayan J et al.[J].Materials Science and Engineering,1998,B53:262. |
| [13] | Voevodin AA.;Laube SJP.;Donley MS.;Zabinski JS.;Capano MA. .DESIGN OF A TI/TIC/DLC FUNCTIONALLY GRADIENT COATING BASED ON STUDIES OF STRUCTURAL TRANSITIONS IN TI-C THIN FILMS[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(1/2):107-115. |
| [14] | Voevodin A A;Zabinski J S .[J].Diamond and Related Materials,1998,7:463. |
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