采用热重分析法(TGA)对直流等离子体喷射制备的金刚石膜在空气中的氧化行为进行了研究,结果表明;直流等离子体喷射制备的金刚石膜氧化激活能为220KJ/mol,与天然金刚石的氧化激活能相当.用扫描电子显微镜(SEM)和Raman光谱对金刚石膜氧化前后的形貌和成分作了分析.结果表明:金刚石膜在空气中氧化优先刻蚀晶界和孔隙,孔隙不断增加,晶界瓦解,金刚石膜成为一个个柱状单晶粉末;金刚石膜氧化前后未出现石墨或其它中间产物.
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