采用纳米压人技术测试薄膜(涂层)的力学性能日益受到关注.测试过程中可自动记录载荷一压深曲线,能够获取薄膜(涂层)的硬度、弹性模量、薄膜(涂层)自身结合强度、膜基界面结合强度、残留应力、屈服强度以及应变硬化率等力学性能数据.本文扼要介绍了纳米压人技术表征薄膜(涂层)力学性能的测试原理.
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