提出一种金刚石膜热沉表面金属化新工艺.该工艺采用Ti/Ni/Au体系和电子束真空镀膜方法,并经过金刚石膜预处理和后续低温真空热处理获得了良好的结合性能.研究表明:预处理对金属层和金刚石膜的结合强度影响显著,结合强度由原来的14.0MPa提高到48.9MPa;金刚石膜/Ti/Ni/Au经过100次从203K到423K冷热循环,金属和金刚石膜之间没有发现脱膜现象.XRD进一步证实:经过后续673K×2h低温真空热处理,Ti/金刚石膜界面形成TiO和TiC.Ti和金刚石膜之间的扩散与反应产物不仅取决于反应温度,还和金刚石膜表面状态有关.
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