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依据能量平衡法则和Moidu等人塑性弯曲耗散功的算法,并考虑残余应力对界面结合能的影响,导出了包括残余应力因素在内的剥离实验界面结合能的表达式.对钛基体和不锈钢基体镍膜的膜基结合强度进行了剥离实验研究,求出了钛基体和不锈钢基体镍膜的界面结合能.结果表明,界面结合能与膜厚、剥离角和残余应力无关.不锈钢基体镍膜的界面结合能为5.47~6.08J/m2,钛基体镍膜的界面结合能为5.33~6.72J/m2.实验结果还表明,膜内残余应力的存在降低了剥离强度.

参考文献

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