在氮气氛中于1650-1850℃的温度范围内对硅/碳化硅材料进行高温处理.通过光学显微镜、扫描电镜和X射线衍射方法,研究反应烧结碳化硅材料的中各相组织及成分随热处理温度的变化规律.结果表明,晶间粒状次生β相SiC首先以溶解-析出形式发生再结晶,而后沉积在α相碳化硅上,通过α-SiC相基面的不断长大,完成β相向α相的转变.从能量的观点在理论上探讨了反应烧结碳化硅中β→α的相转变机理.
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