以 CF4、 CH4和 N2的混合气体为源气体,采用 PECVD技术,在不同源气体流量比下制备了α-C:F:N薄膜.对制备的薄膜进行了真空退火处理,并对退火前后的薄膜进行了拉曼结构分析.拉曼分析表明:α-C:F:N薄膜是由 sp2和 sp3混合结构组成的非晶碳薄膜;随源气体流量比的增大,α-C:F:N薄膜中 sp2键的含量增加,交联结构加强,薄膜的热稳定性得到提高;对低流量比下沉积的薄膜,退火处理可以提高其热稳定性.
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