铁电薄膜的漏电流问题一直是困扰铁电存储器发展的重要问题.文章介绍了铁电薄膜的主要导电机理如热激发电子电导、空间电荷限制电流 (SCLC)、 Pool-Frenkel 发射、肖特基发射等,影响漏电流大小的主要因素如薄膜厚度、工艺温度、晶粒尺寸、电极材料、搀杂离子等.同时介绍了漏电流对铁电薄膜极化和抗疲劳特性的影响.
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