为研究纳米填加剂(Al2O3)对PI复合薄膜击穿性能和微观形貌的影响,对0、5%、10%和20%4种不同质量分数的纳米Al2O3的PI/Al2O3复合薄膜击穿特性进行了测试,并借助扫描电镜对PI/Al2O3复合薄膜击穿孔区形貌进行特征分析,进一步利用积分法计算得到了击穿孔区的有效面积.结果表明:掺杂5%含量的Al2O3的PI复合薄膜击穿场强达到最佳.得出不同组分Al2O3的PI复合薄膜击穿孔有效面积的大小关系是:S20%<S5%<S10%<S0.可见,引入纳米Al2O3颗粒可以使复合薄膜击穿孔的有效面积减小,说明掺杂纳米Al2O3对复合薄膜的击穿孔的有效面积大小是有显著影响的.
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