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本文以醋酸镉、丙醇、丙三醇、三乙胺组成的先驱体溶液作为起始物,采用溶胶-凝胶法,利用旋转涂覆技术,于玻璃基体上制备了高透过率、低电阻的氧化镉薄膜.研究了薄膜的光学性质、导电性能、表面形貌.薄膜的电阻由双探针法测定,并在热处理温度为270℃时得到了一个最低电阻,其值为58 8Ω;薄膜的透过性能由紫外-可见分光光度计测定,在可见光范围内透过率高达90%以上;薄膜的表面形貌由扫描电子显微镜(SEM)测定.研究结果表明,热处理温度对薄膜的导电和可见光透过性能有很大影响.

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