采用直流反应溅射方法制备SnOx气敏薄膜,并且在200℃～1000℃的氧化性气氛中进行退火处理.本文研究了退火工艺对二氧化锡薄膜的相结构和表面形貌的影响,并采用XPS表征了不同退火工艺下薄膜表面化学成分的变化.另外,比较了退火工艺对薄膜的电阻和气敏性能影响.实验证明:退火处理对于薄膜的O/Sn影响不大.经过退火处理的薄膜样品,基本具有完整的金红石结构,随着退火温度的增加,薄膜表面孔隙增加,表面电阻和对氢气的敏感性都显著提高.
参考文献
| [1] | Chadwick B;M Gal .Enhanced optical detection of hydrogen using the excitation of surface plasmons in palladium[J].Applied Surface Science,1993,68:135. |
| [2] | Garcia JA.;Mandelis A. .STUDY OF THE THIN-FILM PALLADIUM/HYDROGEN SYSTEM BY AN OPTICAL TRANSMITTANCE METHOD[J].Review of Scientific Instruments,1996(11):3981-3983. |
| [3] | S G Ansari;S W Gosavi;S A Gangal.Characterization of SnO2-based H2 gas sensors fabricated by different deposition techniques[J].Journal of Materials science:materials in electronics,1997(08):23-27. |
| [4] | M A Butler .Optical fiber hydrogen sensor[J].Applied Physics Letters,1984,45:1007-1009. |
| [5] | M Matsumiya;F Qiu;W Shin;N.Izu,N.Murayama,S.Kanzaki .Thin-film Li-doped NiO for thermoelectric hydrogen gas sensor[J].Thin Solid Films,2002,419:222-226. |
| [6] | Woosuck Shin;Masahiko Matsumiya;Fabin Qiu;Noriya Izu;Normitsu Murayama .Li - and Na-Doped NiO Thick Film for Thermoelectric Hydrogen Sensor[J].日本セラミックス协会学术论文志,2002(1287):995-998. |
| [7] | J Deng W Zhu;O K Tan;X Yao .Amorphous Pb(Zr,Ti)O3 thin film hydrogen gas sensor[J].Sensors and Actuators B:Chemical,2001,77:416-420. |
| [8] | A. Rosental;A. Tarre;A. Gerst;T. Uustare;V. Sammelselg .Atomic-layer chemical vapor deposition of SnO{sub}2 for gas-sensing applications[J].Sensors and Actuators, B. Chemical,2001(1/2):297-300. |
| [9] | Y -S Choe .New gas sensing mechanism for SnO2 thin-films gas sensors fabricated by using dual ion beam sputtering[J].Sensors and Actuators B:Chemical,2001,77:200-208. |
| [10] | M H Madhusudhana Reddy;A N Chandorkar.Response study of electron-beam evaporated thin-film tin oxide gas sensors[J].Stx sors and Actuators B,1992(09):1-8. |
| [11] | Douglas A Asbury;Gar B Hoflund .A surface study of the oxidation of polycrystalline tin[J].Journal of Vacuum Science and Technology A-Vacuum Surfaces and Films,1987,5(04):1132-1135. |
| [12] | Yu KN.;Liu YL.;Xiong CS.;Xiong YH. .MICROSTRUCTURAL CHANGE OF NANO-SNO2 GRAIN ASSEMBLAGES WITH THE ANNEALING, TEMPERATURE[J].Physical Review.B.Condensed Matter,1997(4):2666-2671. |
| [13] | R Sanjines;C Coluzza;D Roseenfeld et al.Photoemission spectromicroscopy:A new insight in the chemistry of SnO2 films for gas sensors[J].Journal of Applied Physics,1993,73(08):3997-4003. |
| [14] | Yuji Matsuil;Yuichi Yamamoto;Satoshi Takeda .Stability in Electrical Properties of Ultra Thin Tin Oxide Films[J].Materials Research Society Symposium Proceedings,2000,6(21):Q491-Q496. |
| [15] | G Heiland;D Kohl in T.Seiyama (Hrsg.)[J].Chemical Sensors Technology,1988(z1):15-38. |
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