单晶硅片纳米磨粒磨损的AFM模拟

1.江南大学机械工程学院,江苏,无锡,214122

2.江南大学机械工程学院,江苏,无锡,214122

3.江南大学机械工程学院,江苏,无锡,214122

基金项目: 清华大学国家重点磨擦学实验室基金(SKLT04-06) 江苏省自然科学基金(BK2004020)

AFM Simulation for a Nano-abrasive Micro-wear on the Silicon

当前的CMP磨损模型中,大多数主要是基于理论分析以及CMP中宏观影响因素所建立,并且都欠缺微观试验的证明.本文提出使用原子力显微镜(AFM)作为CMP中单个纳米磨粒模拟的方法,来验证模拟实验中载荷与扫描速率对微观磨损的影响,并依据此模拟试验的结果探讨了CMP磨损机理.

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