重点研究了聚焦离子束的相关原理和应用。利用聚焦离子束应力引入致形变（ Focused Ion Beam Stress-Introduced De-formation， FIB-SID）技术与常规微加工工艺相结合，制备微型金属无源螺旋电感的设计方法和工艺流程，并对其电学性能进行初步高频测试。首先在SOI（ Silicon-on-Insulator）基片上通过光刻、溅射以及各项同性刻蚀等常规工艺制得悬浮的金属悬臂梁，再利用FIB刻蚀原理进行应力引入，通过控制注入离子剂量、 FIB应力引入的次数、 FIB扫描的间距等试验参数制得不同尺寸结构的三维螺旋金属无源电感。最后，采用安捷伦网络分析仪与微波探针台，使用GSG结构及相应的去嵌方法，对微型金属螺线管电感进行了高频测试。得出了三维螺旋微纳电感的电感值、品质因子、电压驻波比、回波损耗随频率变化关系。
The combination of Focused Ion Beam Stress-introduced Deformation ( FIB-SID) and micro-fabrication tech-nology is focused on, and the fabrication process and test methods of metal passive micro-helix inductor are described. First of all, the suspended metal cantilever is made on SOI(Silicon-on-insulator) by photolithography, sputtering and iso-tropic etching.Then, the stress is introduced to fabricate 3D metal passive micro-helix inductor with different sizes by con-trolling ion dose, FIB stress introduced time, FIB scanning pitch.Finally, the metal passive micro-helix inductor is tested at high frequency with the help of Agilent network analyzers and microwave probe station using GSG test structure and de-embedding process.The relationship between the Inductance value, quality factor, voltage standing wave ratio、 return loss of micro-helix inductors against frequency is obtained.
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