纳机电系统(NMES)由于具有体积小、智能化、可靠性高等优点而被广泛研究.其中纳米线谐振子的本征频率能够达到MHz甚至GHz,可应用于各种高性能的质量传感器、谐振器、滤波器等.但是,要制备形貌规则可控的纳米线谐振子,对加工技术要求很高.目前急需一种工艺简单、重复性好、三维尺度可控的硅纳米线制备方法.本文重点研究了基于浓硼扩散层的可集成硅纳米线谐振子的制备方法.该方法采用电子束光刻定义可控尺度硅纳米线,并利用TMAH腐蚀自停止效应实现谐振子的释放.文中还采用SEM对所制备的纳米线谐振子进行了表征.实验结果表明,基于浓硼扩散层制备的硅纳米线谐振子形貌规则,结构可控可调.该方法能够实现可控制的大面积、高产率、低成本、可集成的硅纳米线谐振子制备.
参考文献
| [1] | Y. T. Yang;K. L. Ekinci;X. M. H. Huang;L. M. Schiavone;M. L. Roukes;C. A. Zorman;M. Mehregany.Monocrystalline silicon carbide nanoelectromechanical systems[J].Applied physics letters,20012(2):162-164. |
| [2] | Erbe A.;Blick R.H..Silicon-on-insulator based nanoresonators for mechanical mixing at radio frequencies[J].IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control,20028(8):1114-1117. |
| [3] | 李永军;刘春艳.一维无机纳米材料的研究进展[J].感光科学与光化学,2003(6):446-468. |
| [4] | Derek C. Johnson;James M. Mosby;Shannon C. Riha.Synthesis of copper silicide nanocrystallites embedded in silicon nanowires for enhanced transport properties[J].Journal of Materials Chemistry: An Interdisciplinary Journal dealing with Synthesis, Structures, Properties and Applications of Materials, Particulary Those Associated with Advanced Technology,201010(10):1993-1998. |
| [5] | Wang FD;Dong AG;Sun JW;Tang R;Yu H;Buhro WE.Solution-liquid-solid growth of semiconductor nanowires[J].Inorganic Chemistry: A Research Journal that Includes Bioinorganic, Catalytic, Organometallic, Solid-State, and Synthetic Chemistry and Reaction Dynamics,200619(19):7511-7521. |
| [6] | Cao GZ;Liu DW.Template-based synthesis of nanorod, nanowire, and nanotube arrays[J].Advances in colloid and interface science,20081/2(1/2):45-64. |
| [7] | Moongyu Jang;Youngsam Park;Younghoon Hyun;Myungsim Jun;Sung-Jin Choi;Taehyung Zyung;Jong-Dae Kim.Top-Down Processed Silicon Nanowires for Thermoelectric Applications[J].Journal of nanoscience and nanotechnology,20124(4):3552-3554. |
| [8] | Yangyang Qi;Zhen Wang;Mingliang Zhang.A Processing Window for Fabricating Heavily Doped Silicon Nanowires by Metal-Assisted Chemical Etching[J].The journal of physical chemistry, C. Nanomaterials and interfaces,201347(47):25090-25096. |
| [9] | Toriyama T.;Sugiyama S..Single crystal silicon piezoresistive nano-wire bridge[J].Sensors and Actuators, A. Physical,20031/3(1/3):244-249. |
| [10] | Koumela, A.;Mercier, D.;Dupré, C.;Jourdan, G.;Marcoux, C.;Ollier, E.;Purcell, S.T.;Duraffourg, L..Piezoresistance of top-down suspended Si nanowires[J].Nanotechnology,201139(39):395701-1-395701-8. |
| [11] | Heng Yang;Kefeng Xu;Yongliang Yang;Tie Li;Jiwei Jiao;Xinxin Li;Yuelin Wang.A novel method to fabricate single crystal nano beams with (111)-oriented Si micromachining[J].Microsystem technologies,20088(8):1185-1191. |
| [12] | Thong JTL.;Chong CW.;Choi WK..TMAH ETCHING OF SILICON AND THE INTERACTION OF ETCHING PARAMETERS[J].Sensors and Actuators, A. Physical,19973(3):243-249. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%