Porous TiO2 thin films were prepared from alkoxide solutions with and without polyethylene glycol (PEG) by sol-gel route on soda lime glass, and were characterized by atomic force microscopy (AFM), transmission electron microscopy (TEM) and X-ray diffraction (XRD). The results show that TiO2 film prepared from precursor solution without PEG is composed of spherical particles of about 100 nm and several nanometer mesoporous pores. With the increase of the amount of PEG added to the precursor solution, the diameter and the depth of the pores in the resultant films increas on the decomposition of PEG during heat-treatment, which lead to the increase of the surface roughness of the films. XRD and TEM results show that the single anatase phase is precipitated and there are some orientation effects in (101) direction.
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