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采用磁控溅射制备了氧化铋薄膜,研究了制备工艺对薄膜的结构、微观形貌和光学性能的影响,并对样品进行了光催化性能评价.结果表明,氧氩比和退火温度显著影响薄膜的性能.当氧氩比为20:80时获得的薄膜具有最佳光催化性能;随退火温度升高,薄膜结晶性增强,并逐渐出现Bi和Si的氧化物,经500℃退火的薄膜具有最强的光催化活性.

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