采用电沉积及400℃不同压力硫化热处理制备了多晶FeS2薄膜,研究了硫化压力对薄膜晶体结构及微观组织的影响.在较低的硫化压力条件下,电沉积得到的Fe3O4先驱体硫化反应不充分,薄膜组织中FeS2与Fe3O4共存.当硫化压力高于20kPa时,Fe3O4先驱体可充分地转变成具有细小晶粒形态的FeS2,薄膜形貌也由多孔疏松演变为均匀平整.硫化压力在5～40kPa范围内变化对FeS2晶粒尺寸影响不明显,但使FeS2晶格常数略有下降.
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