研究了硅微机械高 g(g为重力加速度 )加速度传感器的固有频率和阻尼特性对冲击响应的 影响.传感器固有频率低,阻尼小时,冲击加速度的响应波形包含传感器共振波,造成测量干扰. 采用有适当阻尼,固有频率高的双质量块结构高 g加速度传感器,进行接近 2万 g加速度峰值的 一系列落杆冲击实验,都未见共振响应.同样的传感器制作成欠阻尼,进行实验时,发现共振干扰. 该实验所用的传感器芯片面积小,固有频率高,调整该结构的弹性梁厚度,可制作量程为 2× 103g～ 2× 105g的加速度传感器.
参考文献
| [1] | Meydan T. .RECENT TRENDS IN LINEAR AND ANGULAR ACCELEROMETERS[J].Sensors and Actuators, A. Physical,1997(1/3):43-50. |
| [2] | Ning YB.;Mckinnon G.;Loke Y. .FABRICATION AND CHARACTERIZATION OF HIGH G-FORCE, SILICON PIEZORESISTIVE ACCELEROMETERS[J].Sensors and Actuators, A. Physical,1995(1):55-61. |
| [3] | Anthony S Chu.Problems in high - shock measurement[A].NewMexico USA,1988 |
| [4] | Quanping Huang;Deren Lu.A simple method for primarytesting the micromachining piezoresistive accelerometer witha range more than kilo g[A].Shanghai China,2001 |
| [5] | Bao M.Micro Mechanical Transducers Pressure Sensors Accelerometers and Gyroscopes[M].Amsterdam: Elsevierpublisher,2000:307-311. |
| [6] | Burrer Chr;Esteve J;Plaza J A et al.Fabrication andcharacteration of a twin- mass accelerometer[J].Sensors and Actuators A-physical,1994(A):115-119. |
| [7] | Plaza JA.;Lora-Tamayo E.;Esteve J. .Simple technology for bulk accelerometer based on bond and etch back silicon on insulator wafers[J].Sensors and Actuators, A. Physical,1998(1/3):299-302. |
| [8] | Plaza JA.;Cane C.;Esteve J. .Twin-mass accelerometer optimization to reduce the package stresses[J].Sensors and Actuators, A. Physical,2000(3):199-207. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%