采用阴极电弧蒸发工艺在WC-6Co硬质合金表面制备Ti0.5Al0.5N、Ti0.45Al0.55N和Ti0.4Al0.6N涂层,采用声发射划痕仪测定涂层的结合强度.研究了Al含量对TiAlN涂层结合强度的影响及机理,并分析了TiAlN涂层的失效模式.结果表明,随Al含量增加,Til-xAlxN(x =0.5 ～0.6)涂层结合强度下降.TiAlN涂层结合强度受涂层残余应力与膜基硬度差的影响.Ti0.5Al0.5N涂层残余应力较小,且膜基差异性最小,结合强度最高.Ti0.5Al0.5N和Ti0.45Al0.55N涂层均为楔形剥落,Ti0.4Al0.6N涂层则为屈曲剥落.Al含量增加降低TiAlN涂层结合力,但有利于改善涂层韧性.Ti0.4 Al0.6N涂层因含少量较软的h-AlN相,其韧性明显提高.
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