介绍了半导体制造业专用设备,紫外光刻设备所使用的光学材料.介绍了该材料的选择,研究现状,该材料制造工艺技术的创新,以及与材料制造技术相配套的技术发展状况,同时分析了国际市场现状及该技术的发展趋势.
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