本文根据国内外高纯氮化硅微粉制备的研究情况,综述了硅粉直接氮化法、硅亚胺热分解法、气相反应法等几种氮化硅粉末的主要制备方法,介绍了各种制备方法在生产多晶硅铸锭涂层用氮化硅微粉的优缺点,并从产品质量、成本等角度分析比较了各种制备方法的特点,指出了制备多晶硅铸锭用氮化硅粉末的主要发展方向.
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