采用离子束辅助磁控溅射技术(IBMSD)制备了高硬度、低电阻率的类石墨碳膜(GLC), 用TEM和XRD考察其组成相, 用XPS、FTIR和电阻率间接确定其碳键结构, 并测定了不同气体和离子能
量辅助轰击下制备的几组薄膜的沉积速率、成分、硬度和粗糙度等. 结果表明: 采用IBMSD制备的GLC是一种以sp2键为主的非晶硬质碳膜. CH4辅助轰击较Ar有利于提高沉积速率.
辅助轰击能量的增大使薄膜表面粗糙度先减小后增大, 硬度的变化一定程度上与粗糙度相关.
High hardness and low electrical resistivity graphite-like carbon (GLC) coatings were prepared by ion beam assisted magnetron sputtering deposition (IBMSD). TEM, XRD, XPS, FTIR, four probe electric
receptivity measurement method (FPM), RBS, hardness and AFM were used to sense the structures and evaluate the properties of the carbon coatings. The effects of assisted gaseous and bombarding
energies on structures and properties of the coatings were investigated. Some significant results were obtained as follows. The bond structure of GLC is mainly sp2 , which can be proved by XPS, FTIR
and FPM. XRD and TEM show that its microstructure is amorphous. As CH4 introduced, additional carbon input results in the increase of deposition rate. The surface roughness and hardness
are dependent on bombarding energies.
参考文献
| [1] | |
| [2] | |
| [3] | 黄鹤, 何家文. 机械工程学报, 2002, 38(4): B155-158. [2] 朱宏, 柳襄怀. 金属学报, 1995, 31: B139-143. [3] Amaratunga G A J, et al. Nature, 1996, 383: 321-325. [4] Camino D, et al. Vacuum, 1999, 52: 125-131. [5] Teer G. Wear, 2001, 251: 1068-1074. [6] Yang S, et al. Surface & |
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